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Work Bernoulli Chuck Product List

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Super fine 1.4mm x 55mm ultra-thin long work Bernoulli chuck.

A Bernoulli chuck for non-contact transport of ultra-thin, long workpieces measuring 1.4 mm in width and 55 mm in length.

New method for non-contact suction of ultra-fine and long workpieces: Adoption of the vertical gas jet method (VGF method). The Bernoulli chuck "Float Chuck SA-CL series" has newly adopted the vertical gas jet method (VGFS) to efficiently suction ultra-fine and long workpieces. The vertical gas jet method reduces friction loss of the gas flow in the cushion chamber by vertically jetting the gas flow emitted from the nozzle, enhancing the effect of negative pressure generation, significantly increasing the suspension capability compared to conventional types, thereby improving the holding stability and resistance to impact, while nearly halving gas consumption.

  • Wafer processing/polishing equipment
  • Wafer
  • Separation device

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